In this project, we develop fabrication process of oxides and nitride materials nanostructures pattern by utilizing a method called Sequential Infiltration Synthesis (SIS); and investigate the growth mechanism and optical properties of the fabricated nanorods. SIS is a localized vapor deposition process using polymers for achieving large-scale uniformity of organized nanoscale materials. SIS has been explored extensively by several research groups and by industry leaders in the last few years including PI Biswas. The SIS method potentially can be used for other materials and other nanostructure morphologies to be integrated in emerging devices in the future.
Fabricated inorganic nanostructure patterns using polymer as template and SIS method
In situ FTIR to understand the reaction dynamics
Schematic of the Fabrication Process
Anric ALD System
Inert Atmosphere Glove Box
Spin Coater
Plasma Etcher
High Temperature (1700 oC) Furnace
Analytical Balance
Centrifuge
Clean bench for sample preparation
Field Emission Scanning Electron Microscope (Zeiss Sigma 300)
Cathodoluminescence Imaging (Zeiss )
Energy Dispersive X-ray Spectroscopy (EDS) (Oxford Instrument)
Fourier Transform Infrared Spectroscopy at Biswas lab, ISU
Photoluminescence Spectroscopy at Manna Lab, ISU